The Most Powerful Analytical RHEED System


Reflection high-energy electron diffraction (RHEED) is a technique used to characterize the surface of crystalline materials. For this purpose, kSA 400 analytical RHEED systems are used worldwide in production and research thin-film deposition chambers. They provide important real-time data for growth rate, surface roughness and lattice spacing as well as structural analysis.

The Most Powerful Analytical RHEED System

The kSA 400 is already in its fifth generation and was developed by k-Space Associates, a long-time manufacturer of in situ, in-line, and ex situ metrology tools for the semiconductor, thin-film, and photovoltaic industries. It combines a high-speed, high-resolution and high-sensitivity CCD camera with RHEED-specific software. This flexible system provides the analysis of any image feature and controls the electron gun for such tasks as acquiring RHEED rocking curves.

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